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10.1117/12.57613011 10 2004 12:00AM2561245629531Proc.SPIE5262005POSTER SESSIONSESE5656995629S526We report the experimental fabrication of optical elements with femtosecond pulses. The laser source we adopted is a low power Ti: sapphire laser oscillator, with a central wavelength of 790 nm and pulse duration of 100 fs. Positive-photoresist-coated film acts as the sacrificial material. To obtain the optical elements, three microobjectives with high numerical aperture 0.25 and 0.1 were used to focus the light beam of femtosecond laser. Due to the extreme high intensity of the tightly focused femtosecond laser beam, nonlinear effect occurred between photoresist and the laser pulses, which enable the ablation of the photoresist. In the experiments, we use a translational stage that hold the sample by a pump through a ventage. Various gratings and phase plates are fabricated by this method. The obtained gratings patterns are checked with a conventional optical microscopy. The fabricating widths and depths are measured with the Taylor Hobson equipment. With the same method, photomask for microelectronics can also be fabricated. From the experimental results, we see that the fabrication of the different microobjectives can be achieved with this method. This technique can be applied to the fields of microoptics and microelectronics. The mechanism between femtosecond laser and photoresist is also investigated. The processing mechanics is considered as laser ablation. Fabrication of optical elements with femtosecond laser reflects a new trend for fabrication of microoptical elements.Lasers in Material Processing and Manufacturing IIMicrofabrication of optical elements with femtosecond Ti:sapphire laser oscillator会议论文english,Bing Bai, Changhe Zhou, Xiaohui Sun , Huayi Ru,5257 WOS:000227494300071
外文题目: Microfabrication of optical elements with femtosecond Ti:sapphire laser oscillator
作者: ,Bing Bai, Changhe Zhou, Xiaohui Sun , Huayi Ru,
刊名: Proc.SPIE
来源图书: Lasers in Material Processing and Manufacturing II
年: 2005 卷: 5629 页: 526--531
英文关键词:

POSTER SESSION
英文摘要:
文献类型: 会议论文
正文语种: english
DOI: 10.1117/12.576130
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