尚光网 本站首页 本所首页 联系我们
10.1117/12.2228305ISTPBhattacharyya D, 2002, OPT LASER TECHNOL, V34, P93, DOI 10.1016/S0030-3992(01)00085-8; Freischlad KR, 2001, APPL OPTICS, V40, P1637, DOI 10.1364/AO.40.001637; Griesmann U, 2007, OPT ENG, V46, DOI 10.1117/1.2784531; Griesmann U, 2006, APPL OPTICS, V45, P5856, DOI 10.1364/AO.45.005856; Jia Xin, 2010, ERROR ANAL ABSOLUTE, V7638-124; Kuchel MF, 2001, OPTIK, V112, P381, DOI 10.1078/0030-4026-00076; SCHULZ G, 1992, APPL OPTICS, V31, P3767, DOI 10.1364/AO.31.003767; Wittek Steffen, 2013, P SOC PHOTO-OPT INS, V8788; Xin Jia, 2010, ANAL ABSOLUTE TESTIN, V7656-3E1-3E6; Xu C, 2009, APPL OPTICS, V48, P2536, DOI 10.1364/AO.48.00253610Photoelectronic-Technology-Committee Conference58287649796Proc.SPIE2016full-aperture; full-frequency; absolute testing; N-position rotations; contrast experimentsSESE97979997969796The full-aperture and full-frequency absolute surfaces of optical flats are of great significant for industrial applications but hard to achieve. To measure them simultaneously, Kuechel proposed an absolute testing based on N-position rotations by adding a set of measurement data of N-position rotations, in comparison to the traditional four measurements. Algorithm simulation and absolute detection experiments have been conducted before, however, the influence of rotation angle error has not been analyzed, and the full-aperture contrast experiments have not been conducted. In this paper, the influence of rotation angle error was analyzed, and the measurement result is within acceptable range even when the angle error reaches 1 degrees. Moreover, to verify the accuracy of this method, full-aperture contrast experiments were proposed innovatively besides the two linear profiles contrast experiments. The contrast experiments prove the accuracy of the full-aperture absolute measured results, other than the accuracy of the two linear profiles results.SELECTED PAPERS OF THE PHOTOELECTRONIC TECHNOLOGY COMMITTEE CONFERENCES HELD NOVEMBER 2015Research of Absolute Testing based on N-position Rotations会议论文EnglishLiu, Huanhuan; Liu, Shijie; Gao, Wanrong; Fang, Qiaoran4011997960P WOS:000374450700025
外文题目: Research of Absolute Testing based on N-position Rotations
作者: Liu, Huanhuan; Liu, Shijie; Gao, Wanrong; Fang, Qiaoran
刊名: Proc.SPIE
来源图书: SELECTED PAPERS OF THE PHOTOELECTRONIC TECHNOLOGY COMMITTEE CONFERENCES HELD NOVEMBER 2015
年: 2016 卷: 9796 文章编号:97960P
会议名称: Photoelectronic-Technology-Committee Conference
英文关键词:
full-aperture; full-frequency; absolute testing; N-position rotations; contrast experiments
英文摘要:
文献类型: 会议论文
正文语种: English
收录类别: ISTP  
DOI: 10.1117/12.2228305
全文传递服务
clickdetails
页面点击量: 2
文章下载量: 1
visitlog
友情链接:
  中国光学期刊网
  光电汇
  上海大恒公司
  南京先进激光技术院
  光学产品库
  上海研发公共服务平台
版权所有 © 2009 中国科学院上海光学精密机械研究所 沪ICP备05015387号
主办:中国科学院上海光学精密机械研究所 上海市嘉定区清河路390号(201800)