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CSCDCLAPHAM PB, 1973, NATURE, V244, P281, DOI 10.1038/244281a0; [董亭亭 Dong Tingting], 2016, [光学学报, Acta Optica Sinica], V36, P0522004; [高永锋 Gao Yongfeng], 2015, [中国激光, Chinese Journal of Lasers], V42, P0808004; Hobbs D S, 2012, SPIE. 8530, p85300P; Huang YF, 2007, NAT NANOTECHNOL, V2, P770, DOI 10.1038/nnano.2007.389; Isabella O, 2013, PROG PHOTOVOLTAICS, V21, P94, DOI 10.1002/pip.1257; Karaganov V, 2004, SPIE. 5615, P49; Katsidis CC, 2002, APPL OPTICS, V41, P3978, DOI 10.1364/AO.41.003978; [柯常军 Ke Changjun], 2016, [红外与激光工程, Infrared and Laser engineering], V45, P0305002, DOI 10.3788/IRLA201645.0305002; Ko YH, 2011, OPT EXPRESS, V19, P297, DOI 10.1364/OE.19.000297; Kurisu K, 2003, SPIE. 4830, P313; Lalanne P, 1996, J MOD OPTIC, V43, P2063; [李豪 Li Hao], 2014, [中国激光, Chinese Journal of Lasers], V41, P0707001; McDaniel S, 2014, OPT MATER EXPRESS, V4, P2225, DOI 10.1364/OME.4.002225; MOHARAM MG, 1995, J OPT SOC AM A, V12, P1068, DOI 10.1364/JOSAA.12.001068; Park H, 2011, ADV MATER, V23, P5796, DOI 10.1002/adma.201103399; Qu Y, 2006, Laser Physics Letters, V4, P238; RAGUIN DH, 1993, APPL OPTICS, V32, P1154, DOI 10.1364/AO.32.001154; Sanghera J, 2010, OPT EXPRESS, V18, P26760, DOI 10.1364/OE.18.026760; [尚鹏 Shang Peng], 2014, [中国激光, Chinese Journal of Lasers], V41, P0116004; Stavenga DG, 2006, P ROY SOC B-BIOL SCI, V273, P661, DOI 10.1098/rspb.2005.3369; Yang ZY, 2004, J OPT A-PURE APPL OP, V6, P564, DOI 10.1088/1464-4258/6/6/012; Yao JK, 2007, APPL SURF SCI, V253, P8911, DOI 10.1016/j.apsusc.2007.05.005; Zollars B, 2013, SPIE. 8708, p87080Q; 谭改娟, 2013, 中国光学, V6, P501257012935381光学学报105004采用时域有限差分法研究了硒化锌基底的抛物线型周期阵列仿生微结构的光学性质,重点分析了微结构阵列的周期、高度、占空比和形状轮廓等对反射率的影响,得到了有较好增透效果的结构参数。根据模拟参数进行两次干涉曝光制备掩模,采用反应离子刻蚀技术制备周期阵列微结构。通过场发射扫描电子显微镜对微结构的表面形貌进行表征,并采用傅里叶变换红外光谱仪在中红外波段分别对双面抛光、单面微结构的硒化锌片进行透过率测试。结果表明:单面微结构样品在2~5mum范围内的整体平均透过率比双面抛光硒化锌基片提高了10%,在2.3mum处的最大透过率为82%。2018diffraction; antireflective microstructure; finite-difference time-domain; interferometric lithographyReortSOM218454The optical properties of parabolic cone array microstructure of zinc selenide are researched by finitedifference time-domain method.The effects of microstructure parameters,such as period,height,filling factor,and profile shape on the reflectivity are discussed.Structural parameters corresponding to good antireflection effect are obtained.The parabolic cone period microstructure is prepared by twice interference lithography and reactive ion etching technology according to the simulated results.The surface morphology is analyzed by field emission scanning electron microscopy,and the transmittances of the zinc selenide with double-sides polished and single-side microstructures are respectively measured with the utilization of the Fourier transform infrared spectrometer.The measured results illustrate that the average transmittance of samples with single-sided microstructure is 10%higher than that of double-sided polished zinc selenide at 2-5mum wavelengths,and the transmittance reaches a maximum value of 82%at 2.3mum.Design and Fabrication of Bionic Broadband Antireflective Microstructure on Zinc Selenide期刊论文硒化锌衬底表面仿生宽带增透微结构的设计及制作Chinese衍射; 增透微结构; 时域有限差分法; 干涉曝光费亮; 崔云; 万冬云; 陈鹏; 徐姣 CSCD:6175622
中文题目: 硒化锌衬底表面仿生宽带增透微结构的设计及制作
外文题目: Design and Fabrication of Bionic Broadband Antireflective Microstructure on Zinc Selenide
作者: 费亮; 崔云; 万冬云; 陈鹏; 徐姣
刊名: 光学学报
年: 2018 卷: 38 期: 1 页: 105004
中文关键词:
衍射; 增透微结构; 时域有限差分法; 干涉曝光
英文关键词:

diffraction; antireflective microstructure; finite-difference time-domain; interferometric lithography
中文摘要:
英文摘要:
文献类型: 期刊论文
正文语种: Chinese
收录类别: CSCD  
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