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10.1364/OME.9.001971SCI1-AprAn R, 2005, OPT EXPRESS, V13, P1855, DOI 10.1364/OPEX.13.001855; An R, 2004, CHINESE PHYS LETT, V21, P2465, DOI 10.1088/0256-307X/21/12/040; Bellouard Y, 2004, OPT EXPRESS, V12, P2120, DOI 10.1364/OPEX.12.002120; Cheng Y, 2017, MICROMACHINES-BASEL, V8, DOI 10.3390/mi8020059; Durfee CG, 2012, OPT EXPRESS, V20, P14244, DOI 10.1364/OE.20.014244; Hnatovsky C, 2006, APPL PHYS A-MATER, V84, P47, DOI 10.1007/s00339-006-3590-4; Hwang DJ, 2004, APPL PHYS A-MATER, V79, P605, DOI 10.1007/s00339-004-2547-8; Jing CR, 2016, APPL SCI-BASEL, V6, DOI 10.3390/app6120428; Kiyama S, 2009, J PHYS CHEM C, V113, P11560, DOI 10.1021/jp900915r; Li Y, 2001, OPT LETT, V26, P1912, DOI 10.1364/OL.26.001912; Li Y, 2011, OPT LETT, V36, P4236, DOI 10.1364/OL.36.004236; Malinauskas M, 2016, LIGHT-SCI APPL, V5, DOI 10.1038/lsa.2016.133; Manz A., 2003, MICROSYSTEM TECHNOLO; Marcinkevicius A, 2001, OPT LETT, V26, P277, DOI 10.1364/OL.26.000277; Rodenas A, 2019, NAT PHOTONICS, V13, P105, DOI 10.1038/s41566-018-0327-9; Sugioka K, 2014, APPL PHYS REV, V1, DOI 10.1063/1.4904320; Theberge F, 2006, PHYS REV LETT, V97, DOI 10.1103/PhysRevLett.97.023904; Vitek DN, 2010, OPT EXPRESS, V18, P18086, DOI 10.1364/OE.18.018086; Voldman J, 1999, ANNU REV BIOMED ENG, V1, P401, DOI 10.1146/annurev.bioeng.1.1.401; Zeng B, 2011, PHYS REV A, V84, DOI 10.1103/PhysRevA.84.063819; Zhao X, 2011, APPL PHYS A-MATER, V104, P713, DOI 10.1007/s00339-011-6326-z217087471941978Opt. Mater. Express19712019SODA-LIME GLASS; MICROFABRICATION; FABRICATION; CHANNELSREORTSOM219166We report fabrication of three-dimensional (3D) high aspect ratio microchannels from the rear-surface of thick silica glass with femtosecond laser pulses. To avoid nonlinear self-focusing in the conventional focusing scheme which leads to intensity clamping in the interaction of the ultrafast laser pulses with the silica glass, simultaneous spatiotemporal focusing is employed which gives rise to high aspect ratio (similar to 30) straight and curved microchannels in 10 mm thick silica glass substrates. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing AgreementWater-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses期刊论文EnglishTan, Yuanxin; Chu, Wei; Wang, Peng; Li, Wenbo; Wang, Zhe; Cheng, Ya WOS:000462885100039
外文题目: Water-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses
作者: Tan, Yuanxin; Chu, Wei; Wang, Peng; Li, Wenbo; Wang, Zhe; Cheng, Ya
刊名: Opt. Mater. Express
年: 2019 卷: 9 期: 4 页: 1971--1978
英文关键词:

SODA-LIME GLASS; MICROFABRICATION; FABRICATION; CHANNELS
英文摘要:
文献类型: 期刊论文
正文语种: English
收录类别: SCI  1-Apr
DOI: 10.1364/OME.9.001971
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