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10.1117/12.2320199ISTP[Anonymous], 1999, ISO109934, P4; Ashe B., 2008, P SOC PHOTO-OPT INS, V7069; borson E. N., 2002, IESTSTDCC1246D, P23; Hobbs Douglas S, 2013, P SOC PHOTO-OPT INS, V8885; Hu Zhe, 2016, RES CLEANING PROCESS, P29; Pryatel James A., 2007, P SOC PHOTO-OPT INS, V6403; Sommer S. C., 2002, 48 I ENV SCI TECHNOL, V4; Stowers I. F., 1998, UCRLJC130040, P4; STOWERS IF, 1978, J VAC SCI TECHNOL, V15, P751, DOI 10.1116/1.569504; Zhu Zhenghao, 2016, ACTA PHOTONICA SINIC, V4510Conference on Systems Contamination - Prediction, Control, and Performance701388610748Proc.SPIE2018cleanliness; contamination control method; mass spectrometer; quartz crystal microbalance; transmittanceSESE17179917481748ZCleanliness management is essential for the safe operation of high power laser systems. In order to maintain the transmittance and minimize the optics damage, we should protect the optics surface with coatings from contamination Large aperture optics in the vacuum is easily contaminated by airborne molecular from material outgas. In this paper, we introduce the techniques of cleanliness management in SG-II-UP laser facility. The online monitoring of surface airborne molecular contaminant is carried out with quartz crystal microbalance. We investigated the influence of the airborne molecular contaminant on the 351nm transmittance of fused silica optics with sol-gel coatings.SYSTEMS CONTAMINATION: PREDICTION, CONTROL, AND PERFORMANCE 2018Online detection of airborne molecular contamination and its influence on the sol-gel coating会议论文EnglishPang, Xiangyang; Sun, Mingying; Fan, Quantang; Xiong, Huai; Wang, Congyu; Liu, Zhigang43611 WOS:000452650700021
外文题目: Online detection of airborne molecular contamination and its influence on the sol-gel coating
作者: Pang, Xiangyang; Sun, Mingying; Fan, Quantang; Xiong, Huai; Wang, Congyu; Liu, Zhigang
刊名: Proc.SPIE
来源图书: SYSTEMS CONTAMINATION: PREDICTION, CONTROL, AND PERFORMANCE 2018
年: 2018 卷: 10748
会议名称: Conference on Systems Contamination - Prediction, Control, and Performance
英文关键词:
cleanliness; contamination control method; mass spectrometer; quartz crystal microbalance; transmittance
英文摘要:
文献类型: 会议论文
正文语种: English
收录类别: ISTP  
DOI: 10.1117/12.2320199
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