尚光网 本站首页 本所首页 联系我们
10.1117/12.2266903ISTPHU Z, 2012, P PHOT AS F INT SOC; Martinez K., 2005, C P, V2, P574; Wang J, 2015, OPT ENG, V54, DOI 10.1117/1.OE.54.4.045102; Zhang F, 2015, OPT EXPRESS, V23, P4482, DOI 10.1364/OE.23.0044824International Conference on Optical and Photonics Engineering (icOPEN)592277810250Proc.SPIE2017Lithography illumination system; pupil processing; cloud based application; cross-platform; traditional desktop UI; web UI; websocket; automatic reporting systemSESE1212991251251ZPupil parameters are important parameters to evaluate the quality of lithography illumination system. In this paper, a cloud based full-featured pupil processing application is implemented. A web browser is used for the UI (User Interface), the websocket protocol and JSON format are used for the communication between the client and the server, and the computing part is implemented in the server side, where the application integrated a variety of high quality professional libraries, such as image processing libraries libvips and ImageMagic, automatic reporting system latex, etc., to support the program. The cloud based framework takes advantage of server's superior computing power and rich software collections, and the program could run anywhere there is a modern browser due to its web UI design. Compared to the traditional way of software operation model: purchased, licensed, shipped, downloaded, installed, maintained, and upgraded, the new cloud based approach, which is no installation, easy to use and maintenance, opens up a new way. Cloud based application probably is the future of the software development.INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONICS ENGINEERING (ICOPEN 2016)Design and Implementation of a Cloud Based Lithography Illumination Pupil Processing Application会议论文EnglishZhang, Youbao; Ma, Xinghua; Zhu, Jing; Zhang, Fang; Huang, Huijie40483102501Z WOS:000399339700071
外文题目: Design and Implementation of a Cloud Based Lithography Illumination Pupil Processing Application
作者: Zhang, Youbao; Ma, Xinghua; Zhu, Jing; Zhang, Fang; Huang, Huijie
刊名: Proc.SPIE
来源图书: INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONICS ENGINEERING (ICOPEN 2016)
年: 2017 卷: 10250 文章编号:102501Z
会议名称: International Conference on Optical and Photonics Engineering (icOPEN)
英文关键词:
Lithography illumination system; pupil processing; cloud based application; cross-platform; traditional desktop UI; web UI; websocket; automatic reporting system
英文摘要:
文献类型: 会议论文
正文语种: English
收录类别: ISTP  
DOI: 10.1117/12.2266903
全文传递服务
clickdetails
页面点击量: 11
文章下载量: 3
visitlog
友情链接:
  中国光学期刊网
  光电汇
  上海大恒公司
  南京先进激光技术院
  光学产品库
  上海研发公共服务平台
版权所有 © 2009 中国科学院上海光学精密机械研究所 沪ICP备05015387号
主办:中国科学院上海光学精密机械研究所 上海市嘉定区清河路390号(201800)